In the high-growth color LCD field, a deposition method that allows processing
to be carried out at the lowest possible temperature is now a major requirement
for ITO film processing onto color filters.
We have established such a low
temperature processing technology by further refining our originally developed
sputtering method.
As a result, we are able to produce ITO film featuring
comparatively low resistance at a temperature of less than 200 degree celsius
(against 300 degree celsius in the case of conventional processing), and we have
also realized the mass production of low-resistance ITO film onto color filters.
The
specifications of the films are as follows.
< CLR II >
Resistance:
5.6 ohm/sq;
Film thickness: approx. 300nm;
Transmittance: 80%
<
CLR I>
Resistance: 6.5 ohm/sq;
Film thickness: approx. 260nm;
Transmittance: 83%
< CLR-TFT >
Resistance: 15 orm/sq;
Film thickness: approx. 150nm;
Transmittance: 83%.
In the current situation in which sales of mobile information terminals represented
by mobile phones, etc. are growing remarkably as an IT related industry, Sanyo
Vacuum's anti-reflection film (AR Coat) is gathering widespread attention.
Since
mobile information terminals are often used outdoor, such products are required
to feature low external light reflectivity along with high visibility.
Accordingly,
it is necessary to develop an anti-reflection film that controls the reflection
of external light from the display surface. As a solution to this problem we are
providing AR Coat, which is produced by sputtering deposition.
1. Deposition
characteristics: Our anti-reflection film coating produced by sputtering is superior
deposition characteristics compared when applied to resin, film substrate and
large substrate.
2. Reliability: We produce AR Coat products based on each
user's specifications, which means that our products are highly reliable.